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第三届半导体陶瓷产业论坛
The 3rd Semiconductor Ceramics Industry Forum
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8月26日 10:00-16:00
深圳宝安国际会展中心7号馆论坛区②
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序号
No.
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演讲议题
Thematic Report
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演讲嘉宾
Guest speaker
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1
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半导体设备中的陶瓷材料和部件
Ceramic Materials and Components in Semiconductor Equipment
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清华大学 教授 潘伟
Pan Wei,Professor, Tsinghua University
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2
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静电卡盘及其关键材料技术
Electrostatic Chucks and Their Key Material Technologies
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东南大学 应国兵 教授
Ying Guobing,Professor ,Southeast University
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3
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氮化铝陶瓷加热器的研发及其在 CVD 中的应用
Research and Development of AlN Ceramic Heaters and Their Application in CVD
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广东精瓷新材料有限公司 高级副总裁 於定新
Yu Dingxin,SVP,Fine Ceramic New Material Co.,Ltd.
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4
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碳化硅陶瓷在半导体制程中的应用
Application of Silicon Carbide Ceramics in Semiconductor Manufacturing Processes
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山东国晶新材料有限公司 研发总监 王之腾
Wang Zhiteng, R&D Director, GLOJIN TEK
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5
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致密高强高弹性模量超低膨胀堇青石陶瓷的研究
Research on Dense, High-Strength, High-Elastic-Modulus, Ultra-Low-Expansion Cordierite Ceramics
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华南理工大学材料学院教授 博士生导师 饶平根
Rao Pinggen, Professor,South China University of Technology
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6
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应用于先进陶瓷的助剂
Additives for advanced ceramics
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毕克助剂（上海）有限公司 研发总监 Dr. Hiroshi Yonehara
BYK R&D Director
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7
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静电卡盘精密制造与AI智能检测全产线开发
Development of a Full Production Line for Precision Manufacturing and AI-Based Intelligent Inspection of Electrostatic Chucks
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苏州大学 (高级工程师、苏州高级技术经理人导师）吴刚祥
Wu Gangxiang, Senior Engineer, Soochow University
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8
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从陶瓷3D打印到超精密加工， 构建先进陶瓷的一体化制造能力
From Ceramic 3D Printing to Ultra-Precision Machining: Building Integrated Manufacturing Capabilities for Advanced Ceramics
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新东先进陶瓷中国区 业务开发经理 聂品旭
Nie Pinxu, BD Manager, Sinto Advanced Ceramics
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9
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议题待定
TBC
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淄博科浩热能
Kehao Thermal Energy Engineering
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10
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光固化成型技术在半导体陶瓷材料及零部件领域应用
Application of Light-Curing Forming Technology in the Field of Semiconductor Ceramic Materials and Components
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武汉理工大学 研究员 黄志锋
Huang Zhifeng, Researcher, Wuhan University of Technology
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11
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待定
TBC
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三磨所
ZZSM
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